Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9759997 | Pellicle assembly and method for advanced lithography | Amo Chen, Yun-Yue Lin, Hsin-Chang Lee, Chih-Cheng Lin, Jeng-Horng Chen | 2017-09-12 |
| 9651857 | Mask and method for forming the same | Yun-Yue Lin, Chia-Jen Chen, Hsin-Chang Lee, Anthony Yen | 2017-05-16 |
| 9535317 | Treating a capping layer of a mask | Pei-Cheng Hsu, Chih-Cheng Lin, Wei-Shiuan Chen, Hsin-Chang Lee, Anthony Yen | 2017-01-03 |