Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846930 | Detecting defects on a wafer using defect-specific and multi-channel information | Kenong Wu, Lisheng Gao, David W. Shortt | 2017-12-19 |
| 9816940 | Wafer inspection with focus volumetric method | Keith Wells, Markus Huber, Se Baek Oh | 2017-11-14 |
| 9726617 | Apparatus and methods for finding a best aperture and mode to enhance defect detection | Pavel Kolchin, Richard Wallingford, Lisheng Gao, Markus Huber, Robert M. Danen | 2017-08-08 |
| 9709510 | Determining a configuration for an optical element positioned in a collection aperture during wafer inspection | Pavel Kolchin, Mikhail Haurylau, Junwei Wei, Dan Kapp, Robert M. Danen | 2017-07-18 |
| 9703207 | System and method for reducing dynamic range in images of patterned regions of semiconductor wafers | Daniel L. Cavan | 2017-07-11 |
| 9645093 | System and method for apodization in a semiconductor device inspection system | Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk +8 more | 2017-05-09 |
| 9552636 | Detecting defects on a wafer using defect-specific and multi-channel information | Kenong Wu, Lisheng Gao, David W. Shortt | 2017-01-24 |