SO

Se Baek Oh

KL Kla-Tencor: 1 patents #136 of 395Top 35%
MIT: 1 patents #181 of 984Top 20%
Overall (2017): #107,578 of 506,227Top 25%
2
Patents 2017

Issued Patents 2017

Patent #TitleCo-InventorsDate
9816940 Wafer inspection with focus volumetric method Grace Hsiu-Ling Chen, Keith Wells, Markus Huber 2017-11-14
9684282 System, method and apparatus for wavelength-coded multi-focal microscopy George Barbastathis, Yuan Luo 2017-06-20