Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9734422 | System and method for enhanced defect detection with a digital matched filter | Eugene Shifrin | 2017-08-15 |
| 9726617 | Apparatus and methods for finding a best aperture and mode to enhance defect detection | Richard Wallingford, Lisheng Gao, Grace Hsiu-Ling Chen, Markus Huber, Robert M. Danen | 2017-08-08 |
| 9709510 | Determining a configuration for an optical element positioned in a collection aperture during wafer inspection | Mikhail Haurylau, Junwei Wei, Dan Kapp, Robert M. Danen, Grace Hsiu-Ling Chen | 2017-07-18 |