Issued Patents 2017
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846930 | Detecting defects on a wafer using defect-specific and multi-channel information | Kenong Wu, Grace Hsiu-Ling Chen, David W. Shortt | 2017-12-19 |
| 9830421 | Alignment of inspection to design using built in targets | Santosh Bhattacharyya, Bjorn Braeuer | 2017-11-28 |
| 9727047 | Defect detection using structural information | Qing Luo, Kenong Wu, Hucheng Lee, Eugene Shifrin, Yan Xiong +1 more | 2017-08-08 |
| 9726617 | Apparatus and methods for finding a best aperture and mode to enhance defect detection | Pavel Kolchin, Richard Wallingford, Grace Hsiu-Ling Chen, Markus Huber, Robert M. Danen | 2017-08-08 |
| 9721337 | Detecting defects on a wafer using defect-specific information | Kenong Wu, Meng-Che Wu | 2017-08-01 |
| 9715725 | Context-based inspection for dark field inspection | Yong Zhang, Tao Luo, Chaohong Wu, Stephanie Chen | 2017-07-25 |
| 9704234 | Adaptive local threshold and color filtering | Junqing Huang, Hucheng Lee, Kenong Wu | 2017-07-11 |
| 9619876 | Detecting defects on wafers based on 2D scatter plots of values determined for output generated using different optics modes | Junqing Huang | 2017-04-11 |
| 9601393 | Selecting one or more parameters for inspection of a wafer | Chris W. Lee, Tao Luo, Kenong Wu, Tommaso Torelli, Michael J. Van Riet +1 more | 2017-03-21 |
| 9563943 | Based sampling and binning for yield critical defects | Satya Kurada, Raghav Babulnath, Kwok Ng | 2017-02-07 |
| 9552636 | Detecting defects on a wafer using defect-specific and multi-channel information | Kenong Wu, Grace Hsiu-Ling Chen, David W. Shortt | 2017-01-24 |