Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9726617 | Apparatus and methods for finding a best aperture and mode to enhance defect detection | Pavel Kolchin, Richard Wallingford, Lisheng Gao, Grace Hsiu-Ling Chen, Markus Huber | 2017-08-08 |
| 9709510 | Determining a configuration for an optical element positioned in a collection aperture during wafer inspection | Pavel Kolchin, Mikhail Haurylau, Junwei Wei, Dan Kapp, Grace Hsiu-Ling Chen | 2017-07-18 |
| 9696264 | Apparatus and methods for determining defect depths in vertical stack memory | Steven R. Lange, Stefano Palomba | 2017-07-04 |
| 9645093 | System and method for apodization in a semiconductor device inspection system | Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk +8 more | 2017-05-09 |