Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709510 | Determining a configuration for an optical element positioned in a collection aperture during wafer inspection | Pavel Kolchin, Junwei Wei, Dan Kapp, Robert M. Danen, Grace Hsiu-Ling Chen | 2017-07-18 |
| 9645093 | System and method for apodization in a semiconductor device inspection system | Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk +8 more | 2017-05-09 |