Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709510 | Determining a configuration for an optical element positioned in a collection aperture during wafer inspection | Pavel Kolchin, Mikhail Haurylau, Junwei Wei, Robert M. Danen, Grace Hsiu-Ling Chen | 2017-07-18 |