Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842769 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more | 2017-12-12 |
| 9752228 | Sputtering target for PVD chamber | Zhendong Liu, Rongjun Wang, Xianmin Tang, Tza-Jing Gung, Muhammad M. Rasheed | 2017-09-05 |
| 9683287 | Deposition of films comprising aluminum alloys with high aluminum content | David Thompson, Xinliang Lu, Wei V. Tang, Jing Zhou, Seshadri Ganguli +6 more | 2017-06-20 |
| 9685371 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more | 2017-06-20 |
| 9640400 | Conformal doping in 3D si structure using conformal dopant deposition | Rui Cheng, Abhijit Basu Mallick, Pramit Manna | 2017-05-02 |
| 9601339 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Avgerinos V. Gelatos, Atif Noori, Mei Chang, David Thompson +1 more | 2017-03-21 |
| 9595466 | Methods for etching via atomic layer deposition (ALD) cycles | Xinyu Fu, Mei Chang, Seshadri Ganguli, Guoqiang Jian, Yixiong Yang +2 more | 2017-03-14 |
| 9583349 | Lowering tungsten resistivity by replacing titanium nitride with titanium silicon nitride | Zhendong Liu, Jianxin Lei, Rajkumar Jakkaraju | 2017-02-28 |