Issued Patents 2017
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9845550 | Upper dome with injection assembly | Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack, Zhiyuan Ye +5 more | 2017-12-19 |
| 9842753 | Absorbing lamphead face | Joseph M. Ranish, Satheesh Kuppurao, Balasubramanian Ramachandran, Zuoming ZHU | 2017-12-12 |
| 9832816 | Absorbing reflector for semiconductor processing chamber | Kin Pong Lo, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield, Joseph M. Ranish +6 more | 2017-11-28 |
| 9814099 | Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same | Shu-Kwan LAU, Joseph M. Ranish, Mehmet Tugrul Samir | 2017-11-07 |
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir, David K. Carlson +9 more | 2017-09-19 |
| 9748121 | Thermal coupled quartz dome heat sink | Joseph M. Ranish, Mehmet Tugrul Samir | 2017-08-29 |
| 9711382 | Dome cooling using compliant material | Joseph M. Ranish | 2017-07-18 |
| 9580835 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2017-02-28 |
| 9570275 | Heated showerhead assembly | James D. Carducci, Olga Regelman, Kallol Bera, Douglas A. Buchberger, Jr. | 2017-02-14 |