Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9761416 | Apparatus and methods for reducing particles in semiconductor process chambers | Bradley J. Howard, Shahid Rauf, Ajit Balakrishna, Tom K. Cho, Kenneth S. Collins +3 more | 2017-09-12 |
| 9745663 | Symmetrical inductively coupled plasma source with symmetrical flow chamber | Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci, Douglas A. Buchberger, Jr. +5 more | 2017-08-29 |
| 9741546 | Symmetric plasma process chamber | James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Douglas A. Buchberger, Jr. +3 more | 2017-08-22 |
| 9646843 | Tunable magnetic field to improve uniformity | Tza-Jing Gung, Haitao Wang, Maxim Mikhailovich Noginov, Reza Sadjadi, Chunlei Zhang +1 more | 2017-05-09 |
| 9601301 | Non-intrusive measurement of a wafer DC self-bias in semiconductor processing equipment | Sergey G. Belostotskiy, Chinh Dinh, Michael G. Chafin | 2017-03-21 |