| 9818633 |
Equipment front end module for transferring wafers and method of transferring wafers |
Thorsten Lill, Vahid Vahedi, Candi Kristoffersen, Meihua Shen, Rangesh Raghavan +1 more |
2017-11-14 |
| 9793128 |
Plasma processing chamber with dual axial gas injection and exhaust |
Rajinder Dhindsa, Alexei Marakhtanov |
2017-10-17 |
| 9792393 |
Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization |
Mehmet Derya Tetiker, Saravanapriyan Sriraman, Alex Paterson, Richard A. Gottscho |
2017-10-17 |
| 9735069 |
Method and apparatus for determining process rate |
Yassine Kabouzi, Luc Albarede, Jorge Luque, Seonkyung Lee, Thorsten Lill |
2017-08-15 |
| 9721782 |
Method and apparatus for shaping a gas profile near bevel edge |
Jack Chen, Iqbal Shareef |
2017-08-01 |
| 9640371 |
System and method for detecting a process point in multi-mode pulse processes |
Yassine Kabouzi, Jorge Luque, Mehmet Derya Tetiker, Ramkumar Subramanian, Yoko Yamaguchi |
2017-05-02 |
| 9564308 |
Methods for processing bevel edge etching |
Gregory Sexton, Andras Kuthi, Yunsang Kim |
2017-02-07 |
| 9548189 |
Plasma etching systems and methods using empirical mode decomposition |
Luc Albarede, Yassine Kabouzi, Jorge Luque |
2017-01-17 |
| 9543225 |
Systems and methods for detecting endpoint for through-silicon via reveal applications |
Alan J. Miller, Evelio Sevillano, Jorge Luque, Qing Xu |
2017-01-10 |
