Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778083 | Metrology method for transient gas flow | Evangelos Spyropoulos | 2017-10-03 |
| 9721763 | Systems and methods for providing gases to a process chamber | Mark Taskar, Evangelos Spyropoulos | 2017-08-01 |
| 9721782 | Method and apparatus for shaping a gas profile near bevel edge | Jack Chen, Andrew D. Bailey, III | 2017-08-01 |
| 9704761 | Corrosion sensor retainer assembly apparatus and method for detecting corrosion | Mark Taskar, Anthony Zemlock | 2017-07-11 |
| 9580360 | Monolithic ceramic component of gas delivery system and method of making and use thereof | John Daugherty, Mike Ingamells | 2017-02-28 |