Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9623449 | Dielectric window cleaning apparatuses | Armen Avoyan, Hong Shih, Cliff LaCroix | 2017-04-18 | $24,467,000 |
| 9580360 | Monolithic ceramic component of gas delivery system and method of making and use thereof | Iqbal Shareef, Mike Ingamells | 2017-02-28 | $17,327,000 |
| 9546432 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Hong Shih, Lin Xu, John Michael Kerns, William Charles, Sivakami Ramanathan +3 more | 2017-01-17 | $12,402,000 |