Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748078 | Dual phase cleaning chambers and assemblies comprising the same | Armen Avoyan, Cliff La Croix | 2017-08-29 |
| 9623449 | Dielectric window cleaning apparatuses | Armen Avoyan, Cliff LaCroix, John Daugherty | 2017-04-18 |
| 9546432 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Lin Xu, John Michael Kerns, William Charles, John Daugherty, Sivakami Ramanathan +3 more | 2017-01-17 |