Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818633 | Equipment front end module for transferring wafers and method of transferring wafers | Thorsten Lill, Vahid Vahedi, Andrew D. Bailey, III, Meihua Shen, Rangesh Raghavan +1 more | 2017-11-14 |
| 9698036 | Stacked wafer cassette loading system | Silvia Aguilar, Scott Wong, Derek John Witkowicki, Richard H. Gould, Brandon Senn | 2017-07-04 |