Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818633 | Equipment front end module for transferring wafers and method of transferring wafers | Thorsten Lill, Candi Kristoffersen, Andrew D. Bailey, III, Meihua Shen, Rangesh Raghavan +1 more | 2017-11-14 |
| 9659783 | High aspect ratio etch with combination mask | Joydeep Guha, Sirish Reddy, Kaushik Chattopadhyay, Thomas W. Mountsier, Aaron Eppler +2 more | 2017-05-23 |