Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9766553 | Illumination optical unit for projection lithography | — | 2017-09-19 |
| 9753375 | Illumination optical unit for projection lithography | Axel Scholz, Michael Patra, Frank Schlesener, Wolfgang Emer, Stefanie Hilt | 2017-09-05 |
| 9746779 | Illumination optical unit for projection lithography | — | 2017-08-29 |
| 9720327 | Optical system of a microlithographic projection exposure apparatus | — | 2017-08-01 |
| 9606441 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard +8 more | 2017-03-28 |
| 9575414 | Illumination system for a microlithographic projection exposure apparatus | Johannes Wangler, Heiko Siekmann, Kenneth Weible, Ralf Scharnweber, Markus Deguenther +4 more | 2017-02-21 |