Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9618387 | Method for determining the phase angle and/or the thickness of a contamination layer at an optical element and EUV lithography apparatus | — | 2017-04-11 |
| 9606441 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Gerhard-Wilhelm Ziegler +8 more | 2017-03-28 |