Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9645388 | Facet mirror device | Thomas C. Bischoff | 2017-05-09 |
| 9606441 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard +8 more | 2017-03-28 |
| 9599904 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Alexander Kohl, Michael Patra, Markus Deguenther, Michael Layh | 2017-03-21 |