Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9599904 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther, Michael Layh | 2017-03-21 |