Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846026 | Light-emitting table suitable for use in metrology, and coordinate measuring machine having such a light-emitting table | — | 2017-12-19 |
| 9606441 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Vladimir Davydenko, Michael Gerhard, Gerhard-Wilhelm Ziegler +8 more | 2017-03-28 |