Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9606441 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Michael Gerhard, Gerhard-Wilhelm Ziegler +8 more | 2017-03-28 |
| 9591740 | Negative ion-based neutral beam injector | Yuri I. Belchenko, Alexander V. Burdakov, Gennady I. Dimov, Alexander A. Ivanov, Valeery V. Kobets +4 more | 2017-03-07 |
| 9535210 | Optical hollow waveguide assembly | Stefan Schmidt, Markus Deguenther | 2017-01-03 |