Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9575414 | Illumination system for a microlithographic projection exposure apparatus | Johannes Wangler, Kenneth Weible, Ralf Scharnweber, Manfred Maul, Markus Deguenther +4 more | 2017-02-21 |
| 9541685 | Method for producing a reflective optical component for an EUV projection exposure apparatus and component of this type | Holger Kierey, Andre Bresan | 2017-01-10 |