Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9541685 | Method for producing a reflective optical component for an EUV projection exposure apparatus and component of this type | Heiko Siekmann, Andre Bresan | 2017-01-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9541685 | Method for producing a reflective optical component for an EUV projection exposure apparatus and component of this type | Heiko Siekmann, Andre Bresan | 2017-01-10 |