Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9753375 | Illumination optical unit for projection lithography | Axel Scholz, Michael Patra, Frank Schlesener, Manfred Maul, Wolfgang Emer | 2017-09-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9753375 | Illumination optical unit for projection lithography | Axel Scholz, Michael Patra, Frank Schlesener, Manfred Maul, Wolfgang Emer | 2017-09-05 |