Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9753375 | Illumination optical unit for projection lithography | Axel Scholz, Michael Patra, Frank Schlesener, Manfred Maul, Stefanie Hilt | 2017-09-05 |
| 9715177 | Method for adjusting a projection objective | — | 2017-07-25 |