Issued Patents 2011
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064044 | Exposure apparatus, exposure method, and device producing method | — | 2011-11-22 |
| 8064037 | Immersion exposure apparatus and device manufacturing method with no liquid recovery during exposure | Yuuki Ishii, Susumu Makinouchi | 2011-11-22 |
| 8054447 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroaki Takaiwa, Shigeru Hirukawa, Ryuichi Hoshika, Hitoshi Ishizawa | 2011-11-08 |
| 8027020 | Exposure apparatus, exposure method, and method for producing device | — | 2011-09-27 |
| 8004651 | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method | — | 2011-08-23 |
| 7932991 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Yasugumi Nishii | 2011-04-26 |
| 7932994 | Exposure apparatus, exposure method, and method for producing device | — | 2011-04-26 |
| 7924402 | Exposure apparatus and device manufacturing method | Taro Yamamoto, Osamu Hirakawa | 2011-04-12 |
| 7916270 | Exposure apparatus, exposure method, and device manufacturing method | — | 2011-03-29 |
| 7914972 | Exposure method and device manufacturing method | Tomoharu Fujiwara | 2011-03-29 |
| 7911583 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Yasugumi Nishii | 2011-03-22 |
| 7907254 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Yasugumi Nishii | 2011-03-15 |
| 7907253 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Yasugumi Nishii | 2011-03-15 |