Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064039 | Exposure method, exposure apparatus, and device manufacturing method | Kenichi Shiraishi, Ryuichi Hoshika | 2011-11-22 |
| 8040489 | Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid | Katsushi Nakano, Masahiko Okumura, Tarou Sugihara, Takeyuki Mizutani | 2011-10-18 |
| 8018571 | Exposure apparatus and exposure method, and device manufacturing method | — | 2011-09-13 |
| 7914972 | Exposure method and device manufacturing method | Hiroyuki Nagasaka | 2011-03-29 |