Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072576 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Katsushi Nakano, Soichi Owa | 2011-12-06 |
| 8064039 | Exposure method, exposure apparatus, and device manufacturing method | Ryuichi Hoshika, Tomoharu Fujiwara | 2011-11-22 |
| 8023100 | Exposure apparatus, supply method and recovery method, exposure method, and device producing method | — | 2011-09-20 |
| 7982857 | Stage apparatus, exposure apparatus, and exposure method with recovery device having lyophilic portion | Yasufumi Nishii, Hirotaka Kohno | 2011-07-19 |