Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072576 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano | 2011-12-06 |
| 8040491 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo | 2011-10-18 |
| 7952780 | Microactuator, optical device and exposure apparatus, and device manufacturing method | Junji Suzuki | 2011-05-31 |
| 7948604 | Exposure apparatus and method for producing device | — | 2011-05-24 |
| 7932991 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Yasugumi Nishii | 2011-04-26 |
| 7911583 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Yasugumi Nishii | 2011-03-22 |
| 7907253 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Yasugumi Nishii | 2011-03-15 |
| 7907254 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Yasugumi Nishii | 2011-03-15 |