Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7932991 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Soichi Owa | 2011-04-26 |
| 7911583 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Soichi Owa | 2011-03-22 |
| 7907253 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Soichi Owa | 2011-03-15 |
| 7907254 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Soichi Owa | 2011-03-15 |