Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040491 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Shigeru Hirukawa, Yoshihiko Kudo | 2011-10-18 |
| 8034539 | Exposure apparatus and method for producing device | Hiroaki Takaiwa, Dai Arai | 2011-10-11 |
| 7911582 | Exposure apparatus and device manufacturing method | Shigeru Hirukawa, Issey Tanaka | 2011-03-22 |