Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8054447 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Hiroaki Takaiwa, Ryuichi Hoshika, Hitoshi Ishizawa | 2011-11-08 |
| 8040491 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Yoshihiko Kudo | 2011-10-18 |
| 8004650 | Exposure apparatus and device manufacturing method | — | 2011-08-23 |
| 7911582 | Exposure apparatus and device manufacturing method | Nobutaka Magome, Issey Tanaka | 2011-03-22 |