Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064039 | Exposure method, exposure apparatus, and device manufacturing method | Kenichi Shiraishi, Tomoharu Fujiwara | 2011-11-22 |
| 8054447 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Hiroaki Takaiwa, Shigeru Hirukawa, Hitoshi Ishizawa | 2011-11-08 |