Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8054447 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Shigeru Hirukawa, Ryuichi Hoshika, Hitoshi Ishizawa | 2011-11-08 |
| 8034539 | Exposure apparatus and method for producing device | Nobutaka Magome, Dai Arai | 2011-10-11 |
| 7990516 | Immersion exposure apparatus and device manufacturing method with liquid detection apparatus | Takashi Horiuchi | 2011-08-02 |
| 7990517 | Immersion exposure apparatus and device manufacturing method with residual liquid detector | Takashi Horiuchi | 2011-08-02 |
| 7973910 | Stage apparatus and exposure apparatus | — | 2011-07-05 |