Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072708 | Head suspension, load beam, and method of manufacturing load beam | — | 2011-12-06 |
| 8016285 | Sheet package and printing unit | Yasunori Nakamura, Yoshikatsu Suito | 2011-09-13 |
| 7995186 | Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method | Atsushi Ohta | 2011-08-09 |
| 7990517 | Immersion exposure apparatus and device manufacturing method with residual liquid detector | Hiroaki Takaiwa | 2011-08-02 |
| 7990516 | Immersion exposure apparatus and device manufacturing method with liquid detection apparatus | Hiroaki Takaiwa | 2011-08-02 |
| 7970917 | Virtual file servers with storage device | Takahiro Nakano, Kenichi Miyata, Naoto Matsunami, Junichi Hara | 2011-06-28 |
| 7900910 | Sheet package | Yasunori Nakamura, Yoshikatsu Suito | 2011-03-08 |
| 7898645 | Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method | Nobuyoshi Tanno | 2011-03-01 |