Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8054447 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Hiroaki Takaiwa, Shigeru Hirukawa, Ryuichi Hoshika | 2011-11-08 |
| 7993008 | Optical element and exposure apparatus | Takeshi Shirai, Takao Kokubun, Atsunobu Murakami | 2011-08-09 |