Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7993008 | Optical element and exposure apparatus | Takao Kokubun, Hitoshi Ishizawa, Atsunobu Murakami | 2011-08-09 |
| 7876418 | Optical element and projection exposure apparatus based on use of the optical element | — | 2011-01-25 |