Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072576 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2011-12-06 |
| 7889320 | Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method | Eizo Ohya, Kyoji Nakamura | 2011-02-15 |