Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072576 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Soichi Owa | 2011-12-06 |
| 8053937 | Linear motor, stage apparatus and exposure apparatus | Shigeru Morimoto, Shigeki Kageyama | 2011-11-08 |
| 8040489 | Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid | Masahiko Okumura, Tarou Sugihara, Takeyuki Mizutani, Tomoharu Fujiwara | 2011-10-18 |