Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053937 | Linear motor, stage apparatus and exposure apparatus | Katsushi Nakano, Shigeru Morimoto | 2011-11-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053937 | Linear motor, stage apparatus and exposure apparatus | Katsushi Nakano, Shigeru Morimoto | 2011-11-08 |