Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040489 | Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid | Katsushi Nakano, Tarou Sugihara, Takeyuki Mizutani, Tomoharu Fujiwara | 2011-10-18 |
| 7876452 | Interferometric position-measuring devices and methods | Michael Sogard, Bausan Yuan, Yosuke Shirata, Kiyoshi Uchikawa, Saburo Kamiya +1 more | 2011-01-25 |