Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7916274 | Measurement of EUV intensity | — | 2011-03-29 |
| 7875864 | Devices and methods for thermophoretic and electrophoretic reduction of particulate contamination of lithographic reticles and other objects | — | 2011-01-25 |
| 7876452 | Interferometric position-measuring devices and methods | Bausan Yuan, Masahiko Okumura, Yosuke Shirata, Kiyoshi Uchikawa, Saburo Kamiya +1 more | 2011-01-25 |