Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072576 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2011-12-06 |
| 7876452 | Interferometric position-measuring devices and methods | Michael Sogard, Bausan Yuan, Masahiko Okumura, Yosuke Shirata, Kiyoshi Uchikawa +1 more | 2011-01-25 |