Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7889320 | Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method | Kyoji Nakamura, Yasushi Mizuno | 2011-02-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7889320 | Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method | Kyoji Nakamura, Yasushi Mizuno | 2011-02-15 |