Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968330 | Culture observation equipment | Takayuki Uozumi | 2011-06-28 |
| 7889320 | Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method | Eizo Ohya, Yasushi Mizuno | 2011-02-15 |