Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7952780 | Microactuator, optical device and exposure apparatus, and device manufacturing method | Soichi Owa | 2011-05-31 |
| 7911299 | Microactuator, optical apparatus, and optical switch | — | 2011-03-22 |