Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8035800 | Exposure apparatus, maintenance method, exposure method, and method for producing device | — | 2011-10-11 |
| 7982857 | Stage apparatus, exposure apparatus, and exposure method with recovery device having lyophilic portion | Kenichi Shiraishi, Hirotaka Kohno | 2011-07-19 |