Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7982857 | Stage apparatus, exposure apparatus, and exposure method with recovery device having lyophilic portion | Yasufumi Nishii, Kenichi Shiraishi | 2011-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7982857 | Stage apparatus, exposure apparatus, and exposure method with recovery device having lyophilic portion | Yasufumi Nishii, Kenichi Shiraishi | 2011-07-19 |